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1

Metrology of replicated diffractive optics with Mueller polarimetry in conical diffraction

Novikova, Tatiana, De Martino, Antonello, Bulkin, Pavel, Nguyen, Quang, Drévillon, Bernard, Popov, Vladimir, Chumakov, Alexander

Journal:

Year:

2007

Language:

english

File:

PDF, 2.59 MB

english, 2007

2

Electron cyclotron resonance plasma deposition of SiNx for optical applications

Pavel V. Bulkin, Pieter L. Swart, Beatrys M. Lacquet

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 281 KB

english, 1994

3

Electron cyclotron resonance plasma enhanced chemical vapour deposition and optical properties of SiOx thin films

Pavel V Bulkin, Pieter L Swart, Beatrys M Lacquet

Journal:

Journal of Non-Crystalline Solids

Year:

1998

Language:

english

File:

PDF, 216 KB

english, 1998

4

Optical properties of SiNx deposited by electron cyclotron resonance plasma-enhanced deposition

Bulkin, Pavel V.

Journal:

Optical Engineering

Year:

1994

Language:

english

File:

PDF, 145 KB

english, 1994

5

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Metrology of replicated diffractive optics with Mueller polarimetry in conical diffraction

Novikova, Tatiana, Archie, Chas N., De Martino, Antonello, Bulkin, Pavel, Nguyen, Quang, Drévillon, Bernard, Popov, Vladimir, Chumakov, Alexander

Year:

2007

Language:

english

File:

PDF, 1.48 MB

english, 2007

6

Deposition and optical properties of amorphous hydrogenated SixCy layers

Alexander A. Chumakov, Pavel V. Bulkin, Pieter L. Swart, Beatrys M. Lacquet, Anatoli A. Scherbakov

Journal:

Materials Science and Engineering: B

Year:

1995

Language:

english

File:

PDF, 214 KB

english, 1995

7

Deposition of Ge-doped silica thin films for an integrated optic application using a matrix distributed electron cyclotron resonance PECVD reactor

Roelene Botha, Pavel V. Bulkin, Pieter L. Swart

Journal:

Optical Materials

Year:

2007

Language:

english

File:

PDF, 207 KB

english, 2007

8

Deposition of SiO2 in integrated distributed electron cyclotron resonance microwave reactor

Pavel Bulkin, Nicolas Bertrand, Bernard Drevillon

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 272 KB

english, 1997

9

Effect of ion energy on structural and electrical properties of intrinsic microcrystalline silicon layer deposited in a matrix distributed electron cyclotron resonance plasma reactor

Sanjay K. Ram, Laurent Kroely, Pavel Bulkin, Pere Roca i Cabarrocas

Journal:

physica status solidi (a)

Year:

2010

Language:

english

File:

PDF, 483 KB

english, 2010

10

Plasma emission diagnostics during fast deposition of microcrystalline silicon thin films in matrix distributed electron cyclotron resonance plasma CVD system

Sanjay K. Ram, Laurent Kroely, Samir Kasouit, Pavel Bulkin, Pere Roca i Cabarrocas

Journal:

physica status solidi (c)

Year:

2010

Language:

english

File:

PDF, 800 KB

english, 2010

11

Microcrystalline silicon films and solar cells deposited at high rate by Matrix Distributed Electron Cyclotron Resonance (MDECR) plasma

Laurent Kroely, Sanjay K. Ram, Pavel Bulkin, Pere Roca i Cabarrocas

Journal:

physica status solidi (c)

Year:

2010

Language:

english

File:

PDF, 261 KB

english, 2010

12

Fourier-transform design and electron cyclotron resonance plasma-enhanced deposition of lossy graded-index optical coatings

Bulkin, Pavel V., Swart, Pieter L., Lacquet, Beatrys M.

Journal:

Year:

1996

Language:

english

File:

PDF, 323 KB

english, 1996

13

Direct numerical inversion method for kinetic ellipsometric data. II. Implementation and experimental verification

Hofrichter, Alfred, Kouznetsov, Dmitri, Bulkin, Pavel, Drévillon, Bernard

Journal:

Year:

2002

Language:

english

File:

PDF, 142 KB

english, 2002

14

Correlation of sidelobe suppression between rugate filters and multilayer mirrors

Ibrahim, Bicher Haj, Botha, Roelene, Bourée, Jean-Eric, Bulkin, Pavel, Drévillon, Bernard

Journal:

Year:

2007

Language:

english

File:

PDF, 516 KB

english, 2007

15

Effect of process parameters on the properties of electron cyclotron resonance plasma deposited silicon-oxynitride

Pavel V. Bulkin, Pieter L. Swart, Beatrys M. Lacquet

Journal:

Journal of Non-Crystalline Solids

Year:

1995

Language:

english

File:

PDF, 325 KB

english, 1995

16

Properties and applications of electron cyclotron plasma deposited SiOxNy films with graded refractive index profiles

Pavel V. Bulkin, Pieter L. Swart, Beatrys M. Lacquet

Journal:

Journal of Non-Crystalline Solids

Year:

1995

Language:

english

File:

PDF, 303 KB

english, 1995

17

Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures

Dornstetter, Jean-Christophe, Bruneau, Bastien, Bulkin, Pavel, Johnson, Erik V., Roca i Cabarrocas, Pere

Journal:

The Journal of Chemical Physics

Year:

2014

Language:

english

File:

PDF, 754 KB

english, 2014

18

Mueller polarimetry as a tool for detecting asymmetry in diffraction grating profiles

Novikova, Tatiana, Bulkin, Pavel, Popov, Vladimir, Haj Ibrahim, Bicher, De Martino, Antonello

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2011

Language:

english

File:

PDF, 1.80 MB

english, 2011

19

[IEEE 2014 IEEE 40th Photovoltaic Specialists Conference (PVSC) - Denver, CO, USA (2014.6.8-2014.6.13)] 2014 IEEE 40th Photovoltaic Specialist Conference (PVSC) - High efficiency thin film solar cells deposited at the amorphous-tomicrocrystalline transition using SiF4/H2/Ar gas mixtures

Dornstetter, Jean-Christophe, Bruneau, Bastien, Bulkin, Pavel, Johnson, Erik V., Roca i Cabarrocas, Pere

Year:

2014

Language:

english

File:

PDF, 381 KB

english, 2014

20

SPIE Proceedings [SPIE Optical Instrumentation & Systems Design - Glasgow, United Kingdom (Sunday 12 May 1996)] Developments in Optical Component Coatings - Deposition of conventional and gradient optical coatings by ECR plasma-enhanced chemical vapor deposition

Bulkin, Pavel V., Swart, Pieter L., Lacquet, Beatrys M., Chtcherbakov, Anatoli A.

Year:

1996

Language:

english

File:

PDF, 319 KB

english, 1996

21

SPIE Proceedings [SPIE Photonics Fabrication Europe - Brugge, Belgium (Monday 28 October 2002)] Integrated Optical Devices: Fabrication and Testing - Matrix-distributed ECR-PECVD for high-rate deposition of silica for applications in integrated optics

Girard, Gregory, Danieka, Dmitri, Bulkin, Pavel, Bouree, Jean-Eric, Righini, Giancarlo C.

Year:

2003

Language:

english

File:

PDF, 187 KB

english, 2003

22

SPIE Proceedings [SPIE Optical Instrumentation & Systems Design - Glasgow, United Kingdom (Sunday 12 May 1996)] Developments in Optical Component Coatings - Real-time monitoring by multiwavelength ellipsometry of the growth of silicon alloy multilayers and gradient index structures

Kildemo, Morten, Deniau, S., Bulkin, Pavel, Drevillon, Bernard, Hunderi, Ola D.

Year:

1996

Language:

english

File:

PDF, 353 KB

english, 1996

23

SPIE Proceedings [SPIE Symposium on High-Power Lasers and Applications - San Jose, CA (Saturday 22 January 2000)] Laser Resonators III - Automatic CO2 laser of new generation

Bulkin, Yuri N., Adamenkov, Anatoliy A., Kudryashov, Evgeniy A., Vyskubenko, Boris A., Kolobyanin, Yuriy V., Kuznetzov, Alexsey V., Masychev, Victor I., Kapustin, Pavel, Kudryashov, Alexis V., Paxton,

Year:

2000

Language:

english

File:

PDF, 537 KB

english, 2000

24

SPIE Proceedings [SPIE 1994 International Symposium on Optical Interference Coatings - Grenoble, France (Sunday 5 June 1994)] Optical Interference Coatings - Electron cyclotron resonance plasma chemical vapor deposition for rugate film manufacturing

Bulkin, Pavel V., Swart, Pieter L., Lacquet, Beatrys M., Abeles, Florin

Year:

1994

Language:

english

File:

PDF, 318 KB

english, 1994

25

SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Advances in Optical Thin Films II - Optical thin films deposition by MDECR-PECVD

Haj Ibrahim, Bicher, Amra, Claude, Kaiser, Norbert, Bulkin, Pavel, Daineka, Dmitri, Macleod, H. Angus, Drévillon, Bernard

Year:

2005

Language:

english

File:

PDF, 173 KB

english, 2005

26

SPIE Proceedings [SPIE European Symposium on Optics for Environmental and Public Safety - Munich, Germany (Monday 19 June 1995)] Fiber Optic and Laser Sensors XIII - Rugate mirrors on optical fiber for sensor applications

Chtcherbakov, Anatoli A., Swart, Pieter L., Spammer, Stephanus J., Bulkin, Pavel V., DePaula, Ramon P., Berthold III, John W.

Year:

1995

Language:

english

File:

PDF, 330 KB

english, 1995

27

SPIE Proceedings [SPIE Biomedical Optics 2003 - San Jose, CA (Saturday 25 January 2003)] Optical Diagnostics and Sensing in Biomedicine III - In vitro glucose measurements using a two-wavelength CO2 laser

Lademann, Juergen, Richter, Heike, Meinke, Martina, Mueller, Gerhard J., Kapustin, Pavel, Masychev, Victor I., Bulkin, Yuri N., Berndt, Klaus W., Sterry, Wolfram, Priezzhev, Alexander V., Cote, Gerard

Year:

2003

Language:

english

File:

PDF, 252 KB

english, 2003

28

SPIE Proceedings [SPIE European Symposium on Optics for Environmental and Public Safety - Munich, Germany (Monday 19 June 1995)] Distributed and Multiplexed Fiber Optic Sensors V - Fiber laser with in-fiber Bragg reflector: design formulae with experimental verification

Burger, Johan P., Swart, Pieter L., Spammer, Stephanus J., Bulkin, Pavel V., Dakin, John P., Kersey, Alan D.

Year:

1995

Language:

english

File:

PDF, 299 KB

english, 1995

29

Using MDECR-PECVD to study the impact of ion bombardment energy on microstructural properties of μc-Si:H thin film grown from an SiF 4 /H 2 chemistry

Wang, Junkang, Florea, Ileana, Bulkin, Pavel V., Maurice, Jean-Luc, Johnson, Erik V.

Journal:

Physica status solidi

Year:

2016

Language:

english

File:

PDF, 1.36 MB

english, 2016

30

Microcrystalline silicon thin films deposited by matrix-distributed electron cyclotron resonance plasma enhanced chemical vapor deposition using an SiF 4 /H 2 chemistry

Wang, Junkang, Bulkin, Pavel, Florea, Ileana, Maurice, Jean-Luc, Johnson, Erik

Journal:

Journal of Physics D Applied Physics

Year:

2016

Language:

english

File:

PDF, 1.48 MB

english, 2016

31

Deleterious electrostatic interaction in silicon passivation stack between thin ALD Al 2 O 3 and its a-SiN X :H capping layer: numerical and experimental evidences

Lebreton, Fabien, Lachaume, Raphaël, Bulkin, Pavel, Silva, François, Filonovich, Sergej A., Johnson, Erik V., Cabarrocas, Pere Roca i

Journal:

Energy Procedia

Year:

2017

Language:

english

File:

PDF, 1.38 MB

english, 2017

32

Optical Study and Experimental Realization of Nanostructured Back Reflectors with Reduced Parasitic Losses for Silicon Thin Film Solar Cells

Li, Zeyu, E, Rusli, Lu, Chenjin, Prakoso, Ari, Foldyna, Martin, Khoury, Rasha, Bulkin, Pavel, Wang, Junkang, Chen, Wanghua, Johnson, Erik, Cabarrocas, Pere

Journal:

Year:

2018

Language:

english

File:

PDF, 5.27 MB

english, 2018

33

Large-scale patterning of π-conjugated materials by meniscus guided coating methods

Richard, Mélissa, Al-Ajaji, Abdulelah, Ren, Shiwei, Foti, Antonino, Tran, Jacqueline, Frigoli, Michel, Gusarov, Boris, Bonnassieux, Yvan, Caurel, Enric Garcia, Bulkin, Pavel, Ossikovski, Razvigor, Yas

Journal:

Advances in Colloid and Interface Science

Year:

2019

Language:

english

File:

PDF, 4.06 MB

english, 2019

34

Maskless and contactless patterned silicon deposition using a localized PECVD process

Leal, Ronan, Bruneau, Bastien, Bulkin, Pavel, Novikova, Tatiana, silva, françois, Habka, Nada, Johnson, Erik V

Journal:

Plasma Sources Science and Technology

Year:

2019

File:

PDF, 1.65 MB

2019

35

Area Selective Deposition of Silicon by Plasma Enhanced Chemical Vapor Deposition using a Fluorinated Precursor

Akiki, Ghewa, Suchet, Daniel, Daineka, Dmitri, Filonovich, Sergej, Bulkin, Pavel, Johnson, Erik V.

Journal:

Applied Surface Science

Year:

2020

File:

PDF, 291 KB

2020

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